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赵伟博士现任职于Onto Innovation，做为战略市场总监负责特色工艺器件的市场和应用开拓, 领域涵盖功率器件，三代化合物半导体，传感器，模拟芯片，微机电系统，物联网等。赵伟博士的职业生涯从先进逻辑制程开始，负责平面和鳍式半导体的相关技术研发，通过制程工艺及带领制程整合，同时作为设备战略规划先锋，为半导体制程技术革新提供了重要支持。近些年随着特色工艺器件技术的不断进步，作为设备和技术专家，赵伟博士与诸多厂商合作开发设备和应用以促进技术的进步与革新。在Onto Innovation, 赵伟博士负责整合和扩展其丰富的薄膜和三维量测，缺陷检测，光刻和先进控制产品及技术，使之助于特色工艺器件的研发及高效生产制造。赵伟博士拥有大连理工大学力学学士和硕士学位，以及纽约石溪大学机械工程博士学位。

Process control solutions enabling high performance power devices and efficient manufacturing

Onto Innovation is a leading supplier of metrology and inspection solutions for advanced semiconductor manufacturing. This presentation will discuss several use cases and process control solutions to enable efficient volume manufacturing of power devices. Key product technologies include non-destructive inline film/CD/overlay metrology and macro defect inspection. These connected solutions are vital to retrieve actionable data to maximize yield, performance and reliability for silicon and compound semiconductor manufacturing.